Invention Grant
- Patent Title: MEMS micro-mirror assembly
- Patent Title (中): MEMS微镜组件
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Application No.: US14382724Application Date: 2013-02-11
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Publication No.: US09405116B2Publication Date: 2016-08-02
- Inventor: Faouzi Khechana , Nicolas Abele
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- International Application: PCT/EP2013/052682 WO 20130211
- International Announcement: WO2013/131719 WO 20130912
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81C3/00 ; H05K1/18 ; H05K3/32 ; B81C1/00 ; G02B7/182 ; G02B26/10 ; H05K1/11

Abstract:
A MEMS micro-mirror assembly (250, 300, 270, 400) comprising, a MEMS device (240) which comprises a MEMS die (241) and a magnet (231); a flexible PCB board (205) to which the MEMS device (240) is mechanically, and electrically, connected; wherein the flexible PCB board (205) further comprises a first extension portion (205b) which comprises a least one electrical contact (259a,b) which is useable to electrically connect the MEMS micro-mirro rassembly (250, 300, 270, 400) to another electrical component). There is further provided a projection system comprising such a MEMS micro-mirror assembly (250, 300, 270, 400).
Public/Granted literature
- US20150009549A1 MEMS MICRO-MIRROR ASSEMBLY Public/Granted day:2015-01-08
Information query