Invention Grant
- Patent Title: Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element
- Patent Title (中): 磁场感应元件将圆形垂直霍尔磁场感测元件与平面霍尔元件相结合
-
Application No.: US14550202Application Date: 2014-11-21
-
Publication No.: US09411023B2Publication Date: 2016-08-09
- Inventor: Andreas P. Friedrich , Andrea Foletto , Gary T. Pepka
- Applicant: Allegro MicroSystems, LLC
- Applicant Address: US MA Worcester
- Assignee: ALLEGRO MICROSYSTEMS, LLC
- Current Assignee: ALLEGRO MICROSYSTEMS, LLC
- Current Assignee Address: US MA Worcester
- Agency: Daly, Crowley, Mofford and Durkee, LLP
- Main IPC: G01R33/07
- IPC: G01R33/07 ; H01L43/08 ; G01R33/00 ; H01L43/06
Abstract:
A magnetic field sensor includes a circular vertical Hall (CVH) sensing element and at least one planar Hall element. The CVH sensing element has contacts arranged over a common implant region in a substrate. In some embodiments, the at least one planar Hall element is formed as a circular planar Hall (CPH) sensing element also having contacts disposed over the common implant region. A CPH sensing element and a method of fabricating the CPH sensing element are separately described.
Public/Granted literature
Information query
