发明授权
US09423377B2 Device for detecting at least one gaseous analyte and method for the production thereof
有权
用于检测至少一种气态分析物的装置及其制备方法
- 专利标题: Device for detecting at least one gaseous analyte and method for the production thereof
- 专利标题(中): 用于检测至少一种气态分析物的装置及其制备方法
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申请号: US14945211申请日: 2015-11-18
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公开(公告)号: US09423377B2公开(公告)日: 2016-08-23
- 发明人: Robert Roelver , Daniel Pantel , Stefan Henneck
- 申请人: Robert Bosch GmbH
- 申请人地址: US DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: US DE Stuttgart
- 代理机构: Maginot, Moore & Beck LLP
- 优先权: DE102014223778 20141121
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; G01N27/416 ; G01N27/407 ; H01L21/62 ; G01N27/414
摘要:
A device for detecting at least one gaseous analyte comprises a detection section including a semiconductor substrate and at least one sensor element, which is arranged on the semiconductor substrate. The at least one sensor element includes two electrodes and a solid electrolyte layer arranged between the electrodes. The device also comprises a protective cap configured to cover the at least one sensor element, and at least one temperature-control unit configured for temperature control of the protective cap. The at least one temperature-control unit is arranged on the protective cap. The protective cap is formed from a semiconductor material. The device further comprises a diffusion section having a plurality of passage openings for the gaseous analyte arranged at least in a partial section of the protective cap.
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