发明授权
US09423687B2 Mask plate, method for fabricating array substrate using the same, and array substrate 有权
掩模板,使用其制造阵列基板的方法和阵列基板

Mask plate, method for fabricating array substrate using the same, and array substrate
摘要:
Embodiments of the invention provide a mask plate, a method for fabricating an array substrate using the mask plate, and an array substrate. The mask plate is used for fabricating the array substrate by a stitching exposure. The mask plate comprises 2n+1 mask patterns successively arranged and parallel to each other, where n is any natural number, each mask pattern includes a light-shielding pattern corresponding to a portion of a data signal line on the array substrate. The light-shielding patterns of two adjacent mask patterns are discontinuous, and the portions on both sides of the light-shielding pattern of the mask pattern located in the middle of the mask plate are asymmetric.
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