发明授权
- 专利标题： Coating compositions for use with an overcoated photoresist
- 专利标题（中）： 用于外涂光致抗蚀剂的涂料组合物
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申请号： US11712160申请日： 2007-02-28
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公开(公告)号： US09429844B2公开(公告)日： 2016-08-30
- 发明人: Anthony Zampini , Gerald B. Wayton
- 申请人： Anthony Zampini , Gerald B. Wayton
- 申请人地址： US MA Marlborough
- 专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人： Rohm and Haas Electronic Materials LLC
- 当前专利权人地址： US MA Marlborough
- 代理机构： Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- 代理商 Peter F. Corless
- 主分类号： G03F7/11
- IPC分类号： G03F7/11 ; G03F7/09 ; G03F7/20 ; H01L21/027 ; C08L35/00 ; C09D135/00 ; C08L33/06 ; C08L67/00
摘要：
Organic coating composition are provided including antireflective coating compositions that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. Preferred organic coating compositions of the invention comprise one or more resins that can harden upon thermal treatment without generation of a cleavage product. Particularly preferred organic coating compositions of the invention comprise one or more components that comprise anhydride and hydroxy moieties.
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