Invention Grant
- Patent Title: MOL architecture enabling ultra-regular cross couple
- Patent Title (中): MOL架构使超正规交叉对
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Application No.: US14837222Application Date: 2015-08-27
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Publication No.: US09431300B1Publication Date: 2016-08-30
- Inventor: Jia Zeng , Jongwook Kye , Harry J. Levinson
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8234 ; H01L23/528 ; H01L23/522 ; H01L29/66 ; H01L27/088 ; H01L29/45 ; H01L21/00

Abstract:
A method of forming an ultra-regular layout with unidirectional M1 metal line and the resulting device are disclosed. Embodiments include forming first and second vertical gate lines, spaced from and parallel to each other; forming a M1 metal line parallel to and between the first and second gate lines; forming first, second, and third M0 metal segments perpendicular to the M1 metal line; connecting the first M0 metal segment to the M1 metal line and the second gate line; connecting the second M0 metal segment to the first gate line and the second gate line; connecting the third M0 metal segment to the first gate line and the M1 metal line; forming a first gate cut on the first gate line between the second and third M0 metal segments; and forming a second gate cut on the second gate line between the first and second M0 segments.
Information query
IPC分类: