Methods of manufacturing FINFET semiconductor devices using sacrificial gate patterns and selective oxidization of a fin

Invention Grant

US09431522B2 Methods of manufacturing FINFET semiconductor devices using sacrificial gate patterns and selective oxidization of a fin 有权

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Patent Title: Methods of manufacturing FINFET semiconductor devices using sacrificial gate patterns and selective oxidization of a fin
Application No.: US15003288

Application Date: 2016-01-21
Publication No.: US09431522B2

Publication Date: 2016-08-30
Inventor: Sungmin Kim , Sung-Dae Suk , Jaehoo Park , Dongho Cha , Daewon Ha
Applicant: Samsung Electronics Co., Ltd.
Applicant Address: KR
Assignee: Samsung Electronics Co., Ltd.
Current Assignee: Samsung Electronics Co., Ltd.
Current Assignee Address: KR
Agency: Myers Bigel & Sibley, P.A.
Priority: KR10-2013-0053207 20130510; KR10-2013-0069736 20130618
Main IPC: H01L21/84
IPC: H01L21/84 ; H01L29/66 ; H01L21/02 ; H01L21/308 ; H01L21/762 ; H01L29/06

Methods of manufacturing FINFET semiconductor devices using sacrificial gate patterns and selective oxidization of a fin

Abstract:

A method of manufacturing a semiconductor device includes patterning a substrate to form an active fin, forming a sacrificial gate pattern crossing over the active fin on the substrate, forming an interlayer insulating layer on the sacrificial gate pattern, removing the sacrificial gate pattern to form a gap region exposing the active fin in the interlayer insulating layer, and oxidizing a portion of the active fin exposed by the gap region to form an insulation pattern between the active fin and the substrate.

Public/Granted literature

US20160141392A1 METHODS OF MANUFACTURING FINFET SEMICONDUCTOR DEVICES USING SACRIFICIAL GATE PATTERNS AND SELECTIVE OXIDIZATION OF A FIN Public/Granted day:2016-05-19

Information query

Espacenet

IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L21/00	专门适用于制造或处理半导体或固体器件或其部件的方法或设备
H01L21/70	.由在一共用基片内或其上形成的多个固态组件或集成电路组成的器件或其部件的制造或处理；集成电路器件或其特殊部件的制造（由预制电组件组成的组装件的制造入H05K3/00，H05K13/00）
H01L21/77	..在公共衬底中或上面形成的由许多固态元件或集成电路组成的器件的制造或处理（电可编程只读存储器或其多步骤的制造方法入H01L27/115）
H01L21/78	...把衬底连续地分成多个独立的器件（改变表面物理特性或者半导体形状的切割入H01L21/304）
H01L21/82	....制造器件，例如每一个由许多元件组成的集成电路
H01L21/84	.....衬底不是半导体的，例如绝缘体