Invention Grant
US09437588B1 Middle of-line architecture for dense library layout using M0 hand-shake
有权
使用M0手握密集图书馆布局的中线架构
- Patent Title: Middle of-line architecture for dense library layout using M0 hand-shake
- Patent Title (中): 使用M0手握密集图书馆布局的中线架构
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Application No.: US14742935Application Date: 2015-06-18
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Publication No.: US09437588B1Publication Date: 2016-09-06
- Inventor: Jia Zeng , Jongwook Kye , Harry J. Levinson
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/02 ; H01L21/8234 ; H01L21/768 ; H01L23/528 ; H01L23/522 ; H01L27/088

Abstract:
A dense library architecture using an M0 hand-shake and the method of forming the layout are disclosed. Embodiments include forming first and second active areas on a substrate, at the top and bottom of a cell, separated from each other; forming first through third gate lines perpendicular to the active areas, where the first and third gate lines are dummy gates at the cell edges; forming trench silicide segments on each of the active areas, between the first, second, and third gate lines; forming first and second M1 metal lines between the first and second gate lines and the second and third gate lines, respectively; forming a M0 segment between the first and second active regions perpendicular to the M1 metal lines; forming a CB between the M0 segment and the second gate line; and forming a V0 from the first metal line to the M0 segment.
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