发明授权
- 专利标题： Barrier trench structure and methods of manufacture
- 专利标题（中）： 阻隔沟槽结构和制造方法
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申请号： US14686972申请日： 2015-04-15
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公开(公告)号： US09437595B2公开(公告)日： 2016-09-06
- 发明人: Brent A. Anderson , Andres Bryant , Edward J. Nowak , Jed H. Rankin
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Roberts Mlotkowski Safran Cole & Calderon
- 代理商 Michael LeStrange; Andrew M. Calderon
- 主分类号： H01L27/092
- IPC分类号： H01L27/092 ; H01L21/762 ; H01L21/84 ; H01L27/12 ; H01L21/8234 ; H01L29/06
摘要：
A structure includes at least one shallow trench isolation structure formed in a substrate to isolate adjacent different type devices. The structure further includes a barrier trench structure formed in the substrate to isolate diffusions of adjacent same type devices. The structure further includes a material spanning the barrier trench structure to connect the diffusions of the adjacent same type device, on a same level as the adjacent same type devices.
公开/授权文献
- US20150221646A1 BARRIER TRENCH STRUCTURE AND METHODS OF MANUFACTURE 公开/授权日：2015-08-06
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