Invention Grant
US09437713B2 Devices and methods of forming higher tunability FinFET varactor
有权
形成较高可调谐性FinFET变容二极管的器件和方法
- Patent Title: Devices and methods of forming higher tunability FinFET varactor
- Patent Title (中): 形成较高可调谐性FinFET变容二极管的器件和方法
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Application No.: US14181790Application Date: 2014-02-17
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Publication No.: US09437713B2Publication Date: 2016-09-06
- Inventor: Jagar Singh , Andy Wei , Gopal Srinivasan , Amaury Gendron
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Jacquelyn A Graff
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/308 ; H01L29/94 ; H01L27/06

Abstract:
Devices and methods for forming semiconductor devices with wider FinFETs for higher tunability of the varactor are provided. One method includes, for instance: obtaining an intermediate semiconductor device; applying a spacer layer over the semiconductor device; etching the semiconductor device to remove at least a portion of the spacer layer to expose the plurality of mandrels; removing the mandrels; etching the semiconductor device to remove a portion of the dielectric layer; forming at least one fin; and removing the spacer layer and the dielectric layer. One intermediate semiconductor device includes, for instance: a substrate; a dielectric layer over the substrate; a plurality of mandrels formed on the dielectric layer, the mandrels including a first set of mandrels and a second set of mandrels, wherein the first set of mandrels have a width twice as large as the second set of mandrels; and a spacer layer applied over the mandrels.
Public/Granted literature
- US20150236133A1 DEVICES AND METHODS OF FORMING HIGHER TUNABILITY FINFET VARACTOR Public/Granted day:2015-08-20
Information query
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