发明授权
- 专利标题: Polishing apparatus and polishing method
- 专利标题(中): 抛光设备和抛光方法
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申请号: US13859496申请日: 2013-04-09
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公开(公告)号: US09440327B2公开(公告)日: 2016-09-13
- 发明人: Yasumasa Hiroo , Yoichi Kobayashi , Katsutoshi Ono
- 申请人: Ebara Corporation
- 申请人地址: JP Tokyo
- 专利权人: Ebara Corporation
- 当前专利权人: Ebara Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Baker & Hostetler LLP
- 优先权: JP2012-89585 20120410
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B49/10 ; B24B49/12 ; B24B49/16 ; B24B37/013
摘要:
The present invention provides an apparatus and a method for polishing a substrate having a film formed thereon. The method includes: rotating a polishing table supporting a polishing pad by a table motor; pressing the substrate against the polishing pad by a top ring; obtaining a signal containing a thickness information of the film; producing from the signal a polishing index value that varies in accordance with a thickness of the film; monitoring a torque current value of the table motor and the polishing index value; and determining a polishing end point based on a point of time when the torque current value has reached a predetermined threshold value or a point of time when a predetermined distinctive point of the polishing index value has appeared, whichever comes first.
公开/授权文献
- US20130344773A1 POLISHING APPARATUS AND POLISHING METHOD 公开/授权日:2013-12-26
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