Invention Grant
US09443763B2 Methods for forming interconnections between top electrodes in memory cells by a two-step chemical-mechanical polishing (CMP) process
有权
通过两步化学机械抛光(CMP)工艺在存储器单元中形成顶部电极之间的互连的方法
- Patent Title: Methods for forming interconnections between top electrodes in memory cells by a two-step chemical-mechanical polishing (CMP) process
- Patent Title (中): 通过两步化学机械抛光(CMP)工艺在存储器单元中形成顶部电极之间的互连的方法
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Application No.: US14025537Application Date: 2013-09-12
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Publication No.: US09443763B2Publication Date: 2016-09-13
- Inventor: Samuele Sciarrillo
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L45/00 ; H01L27/24

Abstract:
Memory cell array architectures and methods of forming the same are provided. An example method for forming an array of memory cells can include forming a plurality of vertical structures each having a switch element in series with a memory element in series with a top electrode, and forming an interconnection conductive material between the respective top electrodes of the plurality of vertical structures. The interconnection conductive material is etched-back and chemical-mechanical polished (CMPed). A conductive line is formed over the interconnection conductive material after CMPing the interconnection conductive material.
Public/Granted literature
- US20150069630A1 MEMORY CELL FORMED BY IMPROVED CMP PROCESS Public/Granted day:2015-03-12
Information query
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