Invention Grant
US09443763B2 Methods for forming interconnections between top electrodes in memory cells by a two-step chemical-mechanical polishing (CMP) process 有权
通过两步化学机械抛光(CMP)工艺在存储器单元中形成顶部电极之间的互连的方法

Methods for forming interconnections between top electrodes in memory cells by a two-step chemical-mechanical polishing (CMP) process
Abstract:
Memory cell array architectures and methods of forming the same are provided. An example method for forming an array of memory cells can include forming a plurality of vertical structures each having a switch element in series with a memory element in series with a top electrode, and forming an interconnection conductive material between the respective top electrodes of the plurality of vertical structures. The interconnection conductive material is etched-back and chemical-mechanical polished (CMPed). A conductive line is formed over the interconnection conductive material after CMPing the interconnection conductive material.
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