Invention Grant
- Patent Title: Field-stop reverse conducting insulated gate bipolar transistor and manufacturing method therefor
- Patent Title (中): 场阻反向绝缘栅双极晶体管及其制造方法
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Application No.: US14901606Application Date: 2014-06-06
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Publication No.: US09443926B2Publication Date: 2016-09-13
- Inventor: Shuo Zhang , Qiang Rui , Xiaoshe Deng , Genyi Wang
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN
- Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Current Assignee Address: CN
- Agency: Widerman Malek, PL
- Agent Mark Malek; Daniel Pierron
- Priority: CN201310271614 20130628
- International Application: PCT/CN2014/079355 WO 20140606
- International Announcement: WO2014/206193 WO 20141231
- Main IPC: H01L29/74
- IPC: H01L29/74 ; H01L29/06 ; H01L29/66 ; H01L29/739 ; H01L23/528 ; H01L23/532 ; H01L23/31

Abstract:
A field-stop reverse conducting insulated gate bipolar transistor and a manufacturing method thereof. The transistor comprises a terminal structure (200) and an active region (100). An underlayment of the field-stop reverse conducting insulated gate bipolar transistor is an N-type underlayment, the back surface of the underlayment is provided with an N-type electric field stop layer (1), one surface of the electric field stop layer (1) departing from the underlayment is provided with a back-surface P-type structure (10), and the surface of the back-surface P-type structure (10) is provided with a back-surface metal layer (12). A plurality of polysilicon filling structures (11) which penetrate into the electric field stop layer (1) from the back-surface P-type structure (10) are formed in the active region (100).
Public/Granted literature
- US20160240608A1 FIELD-STOP REVERSE CONDUCTING INSULATED GATE BIPOLAR TRANSISTOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2016-08-18
Information query
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