Invention Grant
US09443958B2 High voltage metal-oxide-semiconductor transistor device and method of forming the same
有权
高压金属氧化物半导体晶体管器件及其形成方法
- Patent Title: High voltage metal-oxide-semiconductor transistor device and method of forming the same
- Patent Title (中): 高压金属氧化物半导体晶体管器件及其形成方法
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Application No.: US14506700Application Date: 2014-10-06
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Publication No.: US09443958B2Publication Date: 2016-09-13
- Inventor: Ming-Shun Hsu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/423

Abstract:
A HVMOS transistor device is provided. The HVMOS has a substrate, a gate structure, a drain region and a source region, a base region and a gate dielectric layer. The substrate has a first insulating structure disposed therein. The gate structure is disposed on the substrate and comprises a first portion covering a portion of the first insulating structure. The drain region and the source region are disposed in the substrate at two respective sides of the gate, and comprise a first conductivity type. The base region encompasses the source region, wherein the base region comprises a second conductivity type complementary to the first conductivity type. The gate dielectric layer is between the gate and the drain region, the base region and the substrate. The gate structure further comprises a second portion penetrating into the base region. A method of forming the HVMOS is further provided.
Public/Granted literature
- US20160099340A1 HIGH VOLTAGE METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICE AND METHOD OF FORMING THE SAME Public/Granted day:2016-04-07
Information query
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