Invention Grant
US09444044B2 Resistive nonvolatile storage device, manufacturing method for same, and resistive nonvolatile storage apparatus
有权
电阻式非易失性存储装置及其制造方法以及电阻性非易失性存储装置
- Patent Title: Resistive nonvolatile storage device, manufacturing method for same, and resistive nonvolatile storage apparatus
- Patent Title (中): 电阻式非易失性存储装置及其制造方法以及电阻性非易失性存储装置
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Application No.: US14642957Application Date: 2015-03-10
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Publication No.: US09444044B2Publication Date: 2016-09-13
- Inventor: Yukio Hayakawa , Yoshio Kawashima
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2014-053051 20140317; JP2014-232103 20141114
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A resistive nonvolatile storage device includes a first interlayer insulating layer provided above a substrate, a contact hole penetrating through the first interlayer insulating layer, a contact layer wholly covering a bottom surface and a sidewall surface of the contact hole and extending to at least partially cover an upper surface of the first interlayer insulating layer, a contact plug filled in the contact hole, an upper surface of the contact plug being positioned below an upper surface of the contact layer, a lower electrode provided on both the contact plug and the contact layer that is provided on the part of the upper surface of the first interlayer insulating layer, and a resistance change layer provided on the lower electrode, and an upper electrode that is provided on the resistance change layer.
Public/Granted literature
Information query
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