Invention Grant
US09444044B2 Resistive nonvolatile storage device, manufacturing method for same, and resistive nonvolatile storage apparatus 有权
电阻式非易失性存储装置及其制造方法以及电阻性非易失性存储装置

Resistive nonvolatile storage device, manufacturing method for same, and resistive nonvolatile storage apparatus
Abstract:
A resistive nonvolatile storage device includes a first interlayer insulating layer provided above a substrate, a contact hole penetrating through the first interlayer insulating layer, a contact layer wholly covering a bottom surface and a sidewall surface of the contact hole and extending to at least partially cover an upper surface of the first interlayer insulating layer, a contact plug filled in the contact hole, an upper surface of the contact plug being positioned below an upper surface of the contact layer, a lower electrode provided on both the contact plug and the contact layer that is provided on the part of the upper surface of the first interlayer insulating layer, and a resistance change layer provided on the lower electrode, and an upper electrode that is provided on the resistance change layer.
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