发明授权
US09446524B2 Wire clamp with piezoelectric actuator and method and apparatus for applying a preload force to the piezoelectric actuator
有权
具有压电致动器的线夹，以及用于向压电致动器施加预载力的方法和装置
- 专利标题： Wire clamp with piezoelectric actuator and method and apparatus for applying a preload force to the piezoelectric actuator
- 专利标题（中）： 具有压电致动器的线夹，以及用于向压电致动器施加预载力的方法和装置
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申请号： US14079840申请日： 2013-11-14
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公开(公告)号： US09446524B2公开(公告)日： 2016-09-20
- 发明人: Yue Zhang , Chong Hao Chen , Zheng Yu Lin
- 申请人： Yue Zhang , Chong Hao Chen , Zheng Yu Lin
- 申请人地址： SG Singapore
- 专利权人： ASM TECHNOLOGY SINGAPORE PTE LTD
- 当前专利权人： ASM TECHNOLOGY SINGAPORE PTE LTD
- 当前专利权人地址： SG Singapore
- 代理机构： Ostrolenk Faber LLP
- 主分类号： B25J15/02
- IPC分类号： B25J15/02 ; B25J15/00 ; H01L23/00 ; E02D3/054
摘要：
A wire clamp includes a clamp body; a pair of arms coupled to the clamp body; and a piezoelectric actuator having a longitudinal axis extending between a first end and a second end, the actuator being coupled to the pair of arms at the first end and to the clamp body at the second end. The second end of the actuator is coupled to the clamp body by a preload mechanism for applying a preload force along the longitudinal axis, and the preload mechanism comprises at least one wedge having an inclined surface which is slidable over a mating inclined surface.
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