Invention Grant
- Patent Title: Low-friction ZnO coating and method for preparing the same
- Patent Title (中): 低摩擦ZnO涂层及其制备方法
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Application No.: US13839025Application Date: 2013-03-15
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Publication No.: US09447286B2Publication Date: 2016-09-20
- Inventor: Masahiro Goto , Akira Kasahara , Masahiro Tosa
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Tsukuba-shi, Ibaraki
- Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Tsukuba-shi, Ibaraki
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2010-210347 20100921
- Main IPC: C09D5/00
- IPC: C09D5/00 ; C23C14/08

Abstract:
[Problem to be Solved]To provide a ZnO coating having low friction not only in a vacuum but in a liquid such as oil.[Solution]The low-friction ZnO coating, comprising (002) and (103) planes, and further comprising (100), (101), (102), and (104) planes in lower proportions than those of the (002) and (103) planes, has been prepared by sputtering using a zinc target in a sputter gas environment, wherein the sputter gas comprises an inert gas and oxygen gas, and the oxygen gas ratio is controlled. This coating has a specifically good low friction coefficient due to the piezoelectric effect, and this friction reduction mechanism is maintained even in oil such as n-hexadecane. Thus, this coating has been found to have excellent low-friction properties.
Public/Granted literature
- US20130206038A1 LOW-FRICTION ZnO COATING AND METHOD FOR PREPARING THE SAME Public/Granted day:2013-08-15
Information query
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