Invention Grant
- Patent Title: Microelectromechanical device having an oscillating mass and a forcing stage, and method of controlling a microelectromechanical device
- Patent Title (中): 具有振荡质量和强迫级的微机电装置以及控制微机电装置的方法
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Application No.: US13799243Application Date: 2013-03-13
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Publication No.: US09448071B2Publication Date: 2016-09-20
- Inventor: Marco Garbarino , Andrea Donadel , Davide Magnoni , Carlo Valzasina
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5762 ; G01C19/5726
Abstract:
A microelectromechanical device includes: a body; a movable mass, elastically coupled to the body and oscillatable with respect to the body according to a degree of freedom; a frequency detector, configured to detect a current oscillation frequency of the movable mass; and a forcing stage, capacitively coupled to the movable mass and configured to provide energy to the movable mass through forcing signals having a forcing frequency equal to the current oscillation frequency detected by the frequency detector, at least in a first transient operating condition.
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