Invention Grant
US09452922B2 Microelectromechanical device with signal routing through a protective cap
有权
具有通过保护盖的信号路由的微机电装置
- Patent Title: Microelectromechanical device with signal routing through a protective cap
- Patent Title (中): 具有通过保护盖的信号路由的微机电装置
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Application No.: US13922033Application Date: 2013-06-19
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Publication No.: US09452922B2Publication Date: 2016-09-27
- Inventor: Giorgio Allegato , Barbara Simoni , Carlo Valzasina , Lorenzo Corso
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2012A0542 20120620
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B7/02 ; B81C1/00

Abstract:
A microelectromechanical device includes: a body accommodating a microelectromechanical structure; and a cap bonded to the body and electrically coupled to the microelectromechanical structure through conductive bonding regions. The cap including a selection module, which has first selection terminals coupled to the microelectromechanical structure, second selection terminals, and at least one control terminal, and which can be controlled through the control terminal to couple the second selection terminals to respective first selection terminals according, selectively, to one of a plurality of coupling configurations corresponding to respective operating conditions.
Public/Granted literature
- US20140230546A1 MICROELECTROMECHANICAL DEVICE WITH SIGNAL ROUTING THROUGH A PROTECTIVE CAP Public/Granted day:2014-08-21
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