Invention Grant
US09455198B1 Methods of removing fins so as to form isolation structures on products that include FinFET semiconductor devices
有权
去除鳍片以便在包括FinFET半导体器件的产品上形成隔离结构的方法
- Patent Title: Methods of removing fins so as to form isolation structures on products that include FinFET semiconductor devices
- Patent Title (中): 去除鳍片以便在包括FinFET半导体器件的产品上形成隔离结构的方法
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Application No.: US14676034Application Date: 2015-04-01
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Publication No.: US09455198B1Publication Date: 2016-09-27
- Inventor: Hong Yu , HongLiang Shen , Zhenyu Hu , Lun Zhao , Richard J. Carter , Xusheng Wu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/308

Abstract:
One illustrative method disclosed herein includes, among other things, removing at least one, but not all, of a plurality of first features in a first patterned mask layer so as to define a modified first patterned masking layer, wherein removed first feature(s) correspond to a location where a final isolation structure will be formed, performing an etching process though the modified first patterned masking layer to form an initial isolation trench in the substrate, and performing another etching process through the modified first patterned mask layer to thereby define a plurality of fin-formation trenches in the substrate and to extend a depth of the initial isolation trench so as to define a final isolation trench for the final isolation structure.
Information query
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