发明授权
US09458538B2 Method and apparatus for sealing an opening of a processing chamber
有权
用于密封处理室的开口的方法和装置
- 专利标题： Method and apparatus for sealing an opening of a processing chamber
- 专利标题（中）： 用于密封处理室的开口的方法和装置
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申请号： US13349307申请日： 2012-01-12
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公开(公告)号： US09458538B2公开(公告)日： 2016-10-04
- 发明人: Shinichi Kurita , Takayuki Matsumoto , Robin L. Tiner , John M. White , Suhail Anwar
- 申请人： Shinichi Kurita , Takayuki Matsumoto , Robin L. Tiner , John M. White , Suhail Anwar
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： C23C16/455
- IPC分类号： C23C16/455 ; C23C16/54
摘要：
A method and apparatus for sealing an opening of a processing chamber are provided. In one embodiment, the invention generally provides a closure member integrated within a wall of a process chamber for sealing an opening within the wall of the chamber. In another embodiment, the invention provides a closure member configured to seal an opening in the wall of a processing chamber from the inside of the chamber.
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