发明授权
- 专利标题： Fabrication apparatus for fabricating a patterned layer
- 专利标题（中）： 用于制造图案层的制造装置
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申请号： US14117436申请日： 2012-05-09
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公开(公告)号： US09472787B2公开(公告)日： 2016-10-18
- 发明人: Christoph Rickers , Pieter Gijsbertus Maria Kruijt
- 申请人： Christoph Rickers , Pieter Gijsbertus Maria Kruijt
- 申请人地址： DE Aachen
- 专利权人： OLEDWorks GmbH
- 当前专利权人： OLEDWorks GmbH
- 当前专利权人地址： DE Aachen
- 代理商 Stephen P. Singer
- 优先权： EP11167070 20110523
- 国际申请： PCT/IB2012/052292 WO 20120509
- 国际公布： WO2012/160468 WO 20121129
- 主分类号： H01L21/02
- IPC分类号： H01L21/02 ; H01L51/56 ; H01L51/00 ; H01L51/50
摘要：
The invention relates to a fabrication apparatus for fabricating a patterned layer (18) on a substrate (14). Protective material (17) is applied in second regions on the substrate (14) and liquid layer material (18) is then printed in first regions being different to the second regions on the substrate (14). The layer material (18) is dried by heating the layer material (18) to a drying temperature being smaller than a melting temperature of the protective material (17), before removing the protective material (17) from the substrate (14) by using a removing temperature being larger than the melting temperature of the protective material (17). A patterned layer (18) can therefore be produced, without using, for example, a costly photolithography process, and because of the use of the protective material (17) the layer material (18) is present in the desired first regions only and not in the second regions. This improves the quality of the patterned layer, which may be used for producing an OLED.
公开/授权文献
- US20140203250A1 FABRICATION APPARATUS FOR FABRICATING A PATTERNED LAYER 公开/授权日：2014-07-24