Invention Grant
US09478402B2 Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
有权
光电倍增管,图像传感器和使用PMT或图像传感器的检测系统
- Patent Title: Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
- Patent Title (中): 光电倍增管,图像传感器和使用PMT或图像传感器的检测系统
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Application No.: US14198175Application Date: 2014-03-05
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Publication No.: US09478402B2Publication Date: 2016-10-25
- Inventor: Yung-Ho Chuang , David L. Brown , John Fielden
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H01L31/11
- IPC: H01L31/11 ; H01L31/167 ; H01J40/06 ; H01L31/103 ; H01J43/08

Abstract:
A photomultiplier tube includes a semiconductor photocathode and a photodiode. Notably, the photodiode includes a p-doped semiconductor layer, an n-doped semiconductor layer formed on a first surface of the p-doped semiconductor layer to form a diode, and a pure boron layer formed on a second surface of the p-doped semiconductor layer. A gap between the semiconductor photocathode and the photodiode may be less than about 1 mm or less than about 500 μm. The semiconductor photocathode may include gallium nitride, e.g. one or more p-doped gallium nitride layers. In other embodiments, the semiconductor photocathode may include silicon. This semiconductor photocathode can further include a pure boron coating on at least one surface.
Public/Granted literature
- US20140291493A1 Photomultiplier Tube, Image Sensor, And an Inspection System Using A PMT Or Image Sensor Public/Granted day:2014-10-02
Information query
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