发明授权
- 专利标题: Semiconductor memory device and method of fabricating the same
- 专利标题(中): 半导体存储器件及其制造方法
-
申请号: US14960776申请日: 2015-12-07
-
公开(公告)号: US09478561B2公开(公告)日: 2016-10-25
- 发明人: Chaeho Kim , Sangryol Yang , Woong Lee , SeungHyun Lim
- 申请人: Chaeho Kim , Sangryol Yang , Woong Lee , SeungHyun Lim
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2015-0015310 20150130; KR10-2015-0022401 20150213
- 主分类号: H01L27/105
- IPC分类号: H01L27/105 ; H01L27/115 ; H01L29/51 ; H01L29/423
摘要:
A semiconductor memory device includes a stack including gate electrodes and insulating layers that are alternately and repeatedly stacked on a substrate. A cell channel structure penetrates the stack. The cell channel structure includes a first semiconductor pattern contacting the substrate and a first channel pattern on the first semiconductor pattern. The first semiconductor pattern extends to a first height from a surface of the substrate to a top surface of the first semiconductor pattern. A dummy channel structure on the substrate and spaced apart from the stack. The dummy channel structure includes a second semiconductor pattern contacting the substrate and a second channel pattern on the second semiconductor pattern. The second semiconductor pattern extends to a second height from the surface of the substrate to a top surface of the second semiconductor pattern. The first height is greater than the second height.
公开/授权文献
信息查询
IPC分类: