Invention Grant
US09481535B2 Method for transferring substrate using vacuum roll-to-roll device 有权
使用真空辊对辊装置转移基材的方法

Method for transferring substrate using vacuum roll-to-roll device
Abstract:
A vacuum roll-to-roll device includes: a first chamber; a second chamber neighboring the first chamber; a shutter disposed between the first chamber and the second chamber; a sealing member attached to the shutter; and a roll-type substrate which moves from the first chamber to the second chamber through the sealing member. A thickness of a lateral side of the roll-type substrate decreases in a direction toward an edge thereof.
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