Invention Grant
- Patent Title: Transmission balancing for phase shift mask with a trim mask
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Application No.: US15144368Application Date: 2016-05-02
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Publication No.: US09482965B2Publication Date: 2016-11-01
- Inventor: Dan Yu , Aaron Bowser , Yi Liu
- Applicant: SEAGATE TECHNOLOGY LLC
- Applicant Address: US CA Cupertino
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Cupertino
- Agency: HolzerIPLaw, PC
- Main IPC: G03F1/30
- IPC: G03F1/30 ; G03F1/50 ; G03F7/20 ; G03F9/00
Abstract:
Implementations described and claimed herein include photolithography technology to alleviate the imbalance of transmission intensity induced. In one implementation, a method comprises exposing an alternating phase shift mask (Alt-PSM) and a trim mask, wherein an exposure placement of the trim mask is shifted relative to an exposure placement of the Alt-PSM.
Public/Granted literature
- US20160246183A1 TRANSMISSION BALANCING FOR PHASE SHIFT MASK WITH A TRIM MASK Public/Granted day:2016-08-25
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