Invention Grant
- Patent Title: Plasma processing method and plasma processing apparatus
- Patent Title (中): 等离子体处理方法和等离子体处理装置
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Application No.: US14475905Application Date: 2014-09-03
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Publication No.: US09484180B2Publication Date: 2016-11-01
- Inventor: Manabu Iwata , Yasuharu Sasaki
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2013-185326 20130906
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/02

Abstract:
A plasma processing apparatus includes a processing chamber; a conductive base within the processing chamber; an electrostatic chuck, having an electrode, provided on the base; a high frequency power supply that applies a high frequency power to the base; a first DC power supply that applies a DC voltage to the electrostatic chuck; and a plasma generation unit that generates plasma of a processing gas within the processing chamber. A plasma processing method performed in the plasma processing apparatus includes connecting the first DC power supply to the electrode of the electrostatic chuck; cutting off connection between the first DC power supply and the electrode of the electrostatic chuck; and generating the plasma within the processing chamber by applying the high frequency power to the base in a state that the connection between the first DC power supply and the electrode of the electrostatic chuck is cut off.
Public/Granted literature
- US20150069910A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2015-03-12
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