Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US14474399Application Date: 2014-09-02
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Publication No.: US09484356B2Publication Date: 2016-11-01
- Inventor: Erh-Kun Lai
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
A semiconductor structure and a method for manufacturing the same are provided. The semiconductor structure comprises a substrate, a stack of alternate conductive layers and insulating layers, an opening, an oxide layer and a conductor. The stack is formed on the substrate. The opening penetrates through the stack. The oxide layer is formed on a sidewall of the opening. The conductor is filled into the opening. The conductor is separated from the sidewall of the opening by only the oxide layer.
Public/Granted literature
- US20160064404A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2016-03-03
Information query
IPC分类: