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US09484428B2 Non-planar exciton transistor (BiSFET) and methods for making 有权
非平面激子晶体管(BiSFET)及其制造方法

Non-planar exciton transistor (BiSFET) and methods for making
Abstract:
A semiconductor device includes a first gate electrode defined on a base layer. A first plurality of layers is disposed on a first sidewall of the first gate electrode. The first plurality of layers includes a first dielectric layer formed on the first sidewall, a first ballistic conductor layer formed above the first dielectric layer, an intermediate layer formed above the first ballistic conductor layer, a second ballistic conductor layer formed above the intermediate layer, and a second dielectric layer formed above the second ballistic conductor layer. A second gate electrode contacts the second dielectric layer.
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