Invention Grant
US09485874B2 Package substrate having photo-sensitive dielectric layer and method of fabricating the same 有权
具有光敏介电层的封装基板及其制造方法

Package substrate having photo-sensitive dielectric layer and method of fabricating the same
Abstract:
A package substrate and a method of fabricating the package substrate are provided. The package substrate may include an interposer having at least one conductive through via, a photo-sensitive dielectric layer formed on one side of the interposer, and at least one conductive via formed in the photo-sensitive dielectric layer and electrically connected to the conductive through via. By means of a photo lithography process with high alignment accuracy, at least one via with an extremely small diameter can be formed on the photo-sensitive dielectric layer and align with the conductive through via. Therefore, the conductive through via can have its diameter reduced as required, without considering the alignment with the at least one via. Accordingly, the interconnection density of the conductive through via on the interposer is increased.
Public/Granted literature
Information query
Patent Agency Ranking
0/0