发明授权
US09494422B2 Lighting device for inspection and lighting method for inspection 有权
用于检查和照明的照明装置用于检查

  • 专利标题: Lighting device for inspection and lighting method for inspection
  • 专利标题(中): 用于检查和照明的照明装置用于检查
  • 申请号: US14362874
    申请日: 2012-11-27
  • 公开(公告)号: US09494422B2
    公开(公告)日: 2016-11-15
  • 发明人: Shigeki Masumura
  • 申请人: CCS Inc.
  • 申请人地址: JP Kyoto-shi
  • 专利权人: CCS Inc.
  • 当前专利权人: CCS Inc.
  • 当前专利权人地址: JP Kyoto-shi
  • 代理机构: Alleman Hall McCoy Russell & Tuttle LLP
  • 优先权: JP2011-267321 20111206
  • 国际申请: PCT/JP2012/080648 WO 20121127
  • 国际公布: WO2013/084755 WO 20130613
  • 主分类号: G01N21/00
  • IPC分类号: G01N21/00 G01B11/30 G01N21/88
Lighting device for inspection and lighting method for inspection
摘要:
In order to make it possible for a difference between a defect and a normal part, such as contrast, to appear, a lighting device for inspection is provided with: a surface light source that emits inspection light; a lens that is provided on a light axis of the inspection light emitted from the surface light source, and between an inspection object and the surface light source; and a first diaphragm that is provided between the lens and the surface light source or the inspection object, wherein: the surface light source and the lens are set such that an image plane on which the surface light source is imaged is present near the inspection object; and the first diaphragm is set such that the central axis of an irradiation solid angle determined by a part of the inspection light is parallel to the light axis.
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