发明授权
US09494543B2 MEMS electrochemical gas sensor 有权
MEMS电化学气体传感器

MEMS electrochemical gas sensor
摘要:
Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
公开/授权文献
信息查询
0/0