发明授权
- 专利标题: MEMS electrochemical gas sensor
- 专利标题(中): MEMS电化学气体传感器
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申请号: US13620546申请日: 2012-09-14
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公开(公告)号: US09494543B2公开(公告)日: 2016-11-15
- 发明人: Seung Eon Moon , Nak Jin Choi , Hyung Kun Lee , Jae Woo Lee , Woo Seok Yang , Jong Dae Kim
- 申请人: Seung Eon Moon , Nak Jin Choi , Hyung Kun Lee , Jae Woo Lee , Woo Seok Yang , Jong Dae Kim
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2011-0098298 20110928
- 主分类号: G01N27/407
- IPC分类号: G01N27/407 ; G01N27/18 ; G01N33/00
摘要:
Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.
公开/授权文献
- US20130075255A1 MEMS ELECTROCHEMICAL GAS SENSOR 公开/授权日:2013-03-28