Invention Grant
- Patent Title: Substrate transferring arm and substrate transferring apparatus including the same
- Patent Title (中): 基板传送臂和包括其的基板传送装置
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Application No.: US14735253Application Date: 2015-06-10
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Publication No.: US09496166B2Publication Date: 2016-11-15
- Inventor: Young Seok Choi
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP HOLDING B.V.
- Current Assignee: ASM IP HOLDING B.V.
- Current Assignee Address: NL Almere
- Agency: Lex IP Meister, PLLC
- Priority: KR10-2014-0081197 20140630
- Main IPC: B66F19/00
- IPC: B66F19/00 ; H01L21/687 ; B25J11/00
Abstract:
A substrate transporting arm and a substrate transporting apparatus to prevent a substrate from sliding and increase a process speed of the substrate, thereby improving productivity. The substrate transporting arm includes a body and a plurality of substrate supporters coupled to the body. Each of the plurality of substrate supporters includes a substrate holder and a substrate supporter pin, and an inner side of the substrate holder includes an inclined portion.
Public/Granted literature
- US20150380286A1 SUBSTRATE TRANSFERRING ARM AND SUBSTRATE TRANSFERRING APPARATUS INCLUDING THE SAME Public/Granted day:2015-12-31
Information query
