Invention Grant
US09496195B2 Semiconductor device and method of depositing encapsulant along sides and surface edge of semiconductor die in embedded WLCSP
有权
在嵌入式WLCSP中沿着半导体晶片的侧面和表面边缘沉积密封剂的半导体器件和方法
- Patent Title: Semiconductor device and method of depositing encapsulant along sides and surface edge of semiconductor die in embedded WLCSP
- Patent Title (中): 在嵌入式WLCSP中沿着半导体晶片的侧面和表面边缘沉积密封剂的半导体器件和方法
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Application No.: US13832809Application Date: 2013-03-15
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Publication No.: US09496195B2Publication Date: 2016-11-15
- Inventor: Yaojian Lin , Heinz-Peter Wirtz , Seung Wook Yoon , Pandi C. Marimuthu
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/28 ; H01L21/78 ; H01L23/00 ; H01L23/31

Abstract:
A semiconductor device has a semiconductor wafer including a plurality of semiconductor die. An insulating layer is formed over the semiconductor wafer. A portion of the insulating layer is removed by LDA to expose a portion of an active surface of the semiconductor die. A first conductive layer is formed over a contact pad on the active surface of the semiconductor die. The semiconductor wafer is singulated to separate the semiconductor die. The semiconductor die is disposed over a carrier with the active surface of the semiconductor die offset from the carrier. An encapsulant is deposited over the semiconductor die and carrier to cover a side of the semiconductor die and the exposed portion of the active surface. An interconnect structure is formed over the first conductive layer. Alternatively, a MUF material is deposited over a side of the semiconductor die and the exposed portion of the active surface.
Public/Granted literature
Information query
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