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US09496264B2 Structure and formation method of FinFET device 有权
FinFET器件的结构和形成方法

Structure and formation method of FinFET device
摘要:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a semiconductor substrate and a first gate stack and a second gate stack over the semiconductor substrate. The semiconductor device structure also includes a first doped structure over the semiconductor substrate and adjacent to the first gate stack. The first doped structure includes a III-V compound semiconductor material and a dopant. The semiconductor device structure further includes a second doped structure over the semiconductor substrate and adjacent to the second gate stack. The second doped structure includes the III-V compound semiconductor material and the dopant. One of the first doped structure and the second doped structure is an n-type semiconductor structure, and the other one of the first doped structure and the second doped structure is a p-type semiconductor structure.
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