Invention Grant
- Patent Title: Vertical-type semiconductor devices and methods of manufacturing the same
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Application No.: US14723644Application Date: 2015-05-28
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Publication No.: US09496277B2Publication Date: 2016-11-15
- Inventor: Yong-Hoon Son , Jong-Wook Lee , Jong-Hyuk Kang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Onello & Mello, LLP
- Priority: KR10-2008-0018980 20080229; KR10-2008-0096030 20080930
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/115 ; H01L29/66 ; H01L29/792 ; H01L27/105 ; H01L21/02 ; H01L21/28 ; H01L21/285 ; H01L21/306 ; H01L21/3213 ; H01L29/423

Abstract:
In a vertical-type memory device and a method of manufacturing the vertical-type memory device, the vertical memory device includes an insulation layer pattern of a linear shape provided on a substrate, pillar-shaped single-crystalline semiconductor patterns provided on both sidewalls of the insulation layer pattern and transistors provided on a sidewall of each of the single-crystalline semiconductor patterns. The transistors are arranged in a vertical direction of the single-crystalline semiconductor pattern, and thus the memory device may be highly integrated.
Public/Granted literature
- US20150263038A1 VERTICAL-TYPE SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2015-09-17
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