Invention Grant
US09502415B2 Method for providing an NMOS device and a PMOS device on a silicon substrate and silicon substrate comprising an NMOS device and a PMOS device
有权
一种用于在硅衬底和包括NMOS器件和PMOS器件的硅衬底上提供NMOS器件和PMOS器件的方法
- Patent Title: Method for providing an NMOS device and a PMOS device on a silicon substrate and silicon substrate comprising an NMOS device and a PMOS device
- Patent Title (中): 一种用于在硅衬底和包括NMOS器件和PMOS器件的硅衬底上提供NMOS器件和PMOS器件的方法
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Application No.: US14808459Application Date: 2015-07-24
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Publication No.: US09502415B2Publication Date: 2016-11-22
- Inventor: Roger Loo , Jerome Mitard , Liesbeth Witters
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP14178560 20140725
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L27/092 ; H01L29/10 ; H01L21/02 ; H01L29/06 ; H01L29/165 ; H01L29/66 ; H01L29/78

Abstract:
The disclosed technology generally relates to complementary metal-oxide-silicon (CMOS) devices, and more particularly to an n-channel metal-oxide-silicon (nMOS) device and a p-channel metal-oxide-silicon (pMOS) device that are under different types of strains. In one aspect, a method comprises providing trenches in a dielectric layer on a semiconductor substrate, where at least a first trench defines an nMOS region and a second trench defines a pMOS region, and where the trenches extend through the dielectric layer and abut a surface of the substrate. The method additionally includes growing a first seed layer in the first trench on the surface and growing a common strain-relaxed buffer layer in the first trench and the second trench, where the common strain-relaxed buffer layer comprises silicon germanium (SiGe). The method further includes growing a common channel layer comprising germanium (Ge) in the first and second trenches and on the common strain-relaxed buffer layer. The properties of the first seed layer and the common strained relaxed buffer layer are predetermined such that the common channel layer is under a tensile strain or is unstrained in the nMOS region and is under a compressive strain in the pMOS region. Aspects also include devices formed using the method.
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