Invention Grant
- Patent Title: Double-side-coated surface stress sensor
- Patent Title (中): 双面涂层表面应力传感器
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Application No.: US14371596Application Date: 2013-04-17
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Publication No.: US09506822B2Publication Date: 2016-11-29
- Inventor: Genki Yoshikawa , Masakazu Aono , Tomonobu Nakayama , Frederic Loizeau , Terunobu Akiyama , Sebastian Gautsch , Peter Vettiger
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Ibaraki
- Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Ibaraki
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2012-094299 20120417
- International Application: PCT/JP2013/061404 WO 20130417
- International Announcement: WO2013/157581 WO 20131024
- Main IPC: G01B7/16
- IPC: G01B7/16 ; G01L1/18 ; G01N29/02 ; G01N29/036

Abstract:
A double-side-coated surface stress sensor includes a sensing membrane structure portion where at least two ends opposite each other are fixed on a mounting portion; a receptor layer that coats both surfaces of the sensing membrane structure portion; and an element detecting a stress, which is provided in the vicinity of at least one of the fixed two ends, opposite each other, of the sensing membrane structure portion or at least one of the fixed two ends, opposite each other, of the mounting portion, in which in a detection output is obtained from the element based on the stress which is applied onto the receptor layer coating both of the surfaces of the sensing membrane structure portion. Accordingly, it is possible to provide a double-side-coated surface stress sensor which coats both surfaces of the sensing membrane structure portion by the receptor layer, thereby obtaining a sufficiently large detection output.
Public/Granted literature
- US20140352447A1 DOUBLE-SIDE-COATED SURFACE STRESS SENSOR Public/Granted day:2014-12-04
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