公开(公告)号：US09506822B2

公开(公告)日：2016-11-29

申请号：US14371596

申请日：2013-04-17

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Genki Yoshikawa ,  Masakazu Aono ,  Tomonobu Nakayama ,  Frederic Loizeau ,  Terunobu Akiyama ,  Sebastian Gautsch ,  Peter Vettiger

IPC: G01B7/16 ,  G01L1/18 ,  G01N29/02 ,  G01N29/036

CPC classification number: G01L1/18 ,  G01L1/183 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0256 ,  G01N2291/02827

Abstract: A double-side-coated surface stress sensor includes a sensing membrane structure portion where at least two ends opposite each other are fixed on a mounting portion; a receptor layer that coats both surfaces of the sensing membrane structure portion; and an element detecting a stress, which is provided in the vicinity of at least one of the fixed two ends, opposite each other, of the sensing membrane structure portion or at least one of the fixed two ends, opposite each other, of the mounting portion, in which in a detection output is obtained from the element based on the stress which is applied onto the receptor layer coating both of the surfaces of the sensing membrane structure portion. Accordingly, it is possible to provide a double-side-coated surface stress sensor which coats both surfaces of the sensing membrane structure portion by the receptor layer, thereby obtaining a sufficiently large detection output.

Abstract translation: 双面涂布表面应力传感器包括传感膜结构部分，其中彼此相对的至少两个端部固定在安装部分上; 覆盖感测膜结构部分的两个表面的受体层; 以及检测应力的元件，其设置在感测膜结构部分的彼此相对的固定的两个端部中的至少一个附近，或彼此相对的固定的两个端部中的至少一个 在检测输出中，基于施加到涂覆在感测膜结构部分的两个表面上的受体层上的应力，从元件获得检测输出部分。 因此，可以提供通过受体层涂覆感测膜结构部分的两个表面的双面涂覆的表面应力传感器，从而获得足够大的检测输出。

公开(公告)号：US20140352447A1

公开(公告)日：2014-12-04

申请号：US14371596

申请日：2013-04-17

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Genki Yoshikawa ,  Masakazu Aono ,  Tomonobu Nakayama ,  Frederic Loizeau ,  Terunobu Akiyama ,  Sebastian Gautsch ,  Peter Vettiger

IPC: G01L1/18

CPC classification number: G01L1/18 ,  G01L1/183 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/0256 ,  G01N2291/02827

Abstract: A double-side-coated surface stress sensor includes a sensing membrane structure portion where at least two ends opposite each other are fixed on a mounting portion; a receptor layer that coats both surfaces of the sensing membrane structure portion; and an element detecting a stress, which is provided in the vicinity of at least one of the fixed two ends, opposite each other, of the sensing membrane structure portion or at least one of the fixed two ends, opposite each other, of the mounting portion, in which in a detection output is obtained from the element based on the stress which is applied onto the receptor layer coating the both surfaces of the sensing membrane structure portion. Accordingly, it is possible to provide a double-side-coated surface stress sensor which coats both surfaces of the sensing membrane structure portion by the receptor layer, thereby obtaining a sufficiently large detection output.

Abstract translation: 双面涂布表面应力传感器包括传感膜结构部分，其中彼此相对的至少两个端部固定在安装部分上; 覆盖感测膜结构部分的两个表面的受体层; 以及检测应力的元件，其设置在感测膜结构部分的彼此相对的固定的两个端部中的至少一个附近，或彼此相对的固定的两个端部中的至少一个 部分，其中根据施加到涂覆在感测膜结构部分的两个表面上的受体层上的应力，从元件获得检测输出。 因此，可以提供通过受体层涂覆感测膜结构部分的两个表面的双面涂覆的表面应力传感器，从而获得足够大的检测输出。