Invention Grant
- Patent Title: Pulsed laser induced plasma light source
- Patent Title (中): 脉冲激光诱导等离子体光源
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Application No.: US14578949Application Date: 2014-12-22
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Publication No.: US09506871B1Publication Date: 2016-11-29
- Inventor: Klaus Flock
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Spano Law Group
- Agent Joseph S. Spano
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/88 ; G01N21/95 ; G01N21/956 ; F21K99/00 ; H05H1/46 ; G02B27/09

Abstract:
Methods and systems are described herein for producing high radiance illumination light suitable for semiconductor metrology. A cold gas is repeatedly ignited by a pulsed laser to periodically generate accessible, high brightness illumination light generated during each break-down event. The pulse duration and repetition period are set to ignite, but not sustain fully formed plasma. The central plasma core emits high color temperature light before a cooler plasma region forms around the central core. Thus, after ignition, the plasma is extinguished before the arrival of the next laser pulse. The repeated plasma ignition/extinction cycle generates illumination light at high color temperature that is accessible for illumination purposes in a metrology application. In one embodiment, a bulb filled with Xenon gas at 10 atmospheres is repeatedly ignited with a pulsed laser having pulse duration of 10 nanoseconds to generate illumination light with a color temperature of approximately 60,000 Kelvin.
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