发明授权
- 专利标题: Thin film transistor
- 专利标题(中): 薄膜晶体管
-
申请号: US14436241申请日: 2013-10-15
-
公开(公告)号: US09508856B2公开(公告)日: 2016-11-29
- 发明人: Hiroaki Tao , Takeaki Maeda , Aya Miki , Toshihiro Kugimiya , Byung Du Ahn , So Young Koo , Gun Hee Kim
- 申请人: KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) , Samsung Display Co., Ltd.
- 申请人地址: JP Kobe-shi KR Yongin
- 专利权人: Kobe Steel, Ltd.,Samsung Display Co., Ltd.
- 当前专利权人: Kobe Steel, Ltd.,Samsung Display Co., Ltd.
- 当前专利权人地址: JP Kobe-shi KR Yongin
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2012-231805 20121019
- 国际申请: PCT/JP2013/077913 WO 20131015
- 国际公布: WO2014/061638 WO 20140424
- 主分类号: H01L29/786
- IPC分类号: H01L29/786
摘要:
Provided is a thin film transistor wherein the shape of a protrusion formed on the interface between an oxide semiconductor layer and a protection film is suitably controlled, and stable characteristics are achieved. This thin film transistor is characterized in that: the thin film transistor has an oxide semiconductor layer formed of an oxide containing at least In, Zn and Sn as metal elements, and a protection film directly in contact with the oxide semiconductor layer; and the maximum height of a protrusion formed on the oxide semiconductor layer surface directly in contact with the protection film is less than 5 nm.
公开/授权文献
- US20150249159A1 THIN FILM TRANSISTOR 公开/授权日:2015-09-03
信息查询
IPC分类: