发明授权
- 专利标题: Vertical memory devices
- 专利标题(中): 垂直存储器件
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申请号: US14988178申请日: 2016-01-05
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公开(公告)号: US09524983B2公开(公告)日: 2016-12-20
- 发明人: Byung-Jin Lee , Jee-Yong Kim , Dae-Seok Byeon
- 申请人: Byung-Jin Lee , Jee-Yong Kim , Dae-Seok Byeon
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2015-0033070 20150310; KR10-2015-0067286 20150514
- 主分类号: H01L27/115
- IPC分类号: H01L27/115
摘要:
A vertical memory device includes a substrate, gate lines, channels, contacts and contact spacers. The gate lines are stacked on top of each other on the substrate. The gate lines are spaced apart from each other in a vertical direction with respect to a top surface of the substrate. The gate lines include step portions that extend in a parallel direction with respect to the top surface of the substrate. The channels extend through the gate lines in the vertical direction. The contacts are on the step portions of the gate lines. The contact spacers are selectively formed along sidewalls of a portion of the contacts.
公开/授权文献
- US20160268301A1 VERTICAL MEMORY DEVICES 公开/授权日:2016-09-15
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