Invention Grant
US09528614B2 Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement 有权
用于通过线性运动以气密方式封闭流路的真空阀和关闭件

Vacuum valve and closure member for closing a flow path in a gas-tight manner by means of a linear movement
Abstract:
A vacuum valve closes a flow path in a gas-tight manner using a linear movement and includes a closure member, a first sealing surface of the valve housing that encloses the opening, and a corresponding second sealing surface of the closure member. In the closed position, the second sealing surface is in sealing contact with the first sealing surface. In the region between the opening and the first sealing surface, the valve housing includes a first sloped surface that encloses the opening, and the closure member includes a corresponding, parallel second sloped surface. The sloped surfaces, which have a sloping angle between 3 and 15 degrees relative to the geometric adjustment axis, are located such that, in the closed position of the closure member, the second sloped surface is arranged in a parallel position opposite the first sloped surface at a distance of 0 and 0.6 mm.
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