A method is provided for manufacturing a scintillator panel including a substrate and a scintillator layer containing a plurality of crystals formed by depositing a scintillator material on a deposition surface of the substrate. The method includes depositing the scintillator material on the deposition surface of the substrate such that the scintillator material incidents on the deposition surface obliquely with respect to the normal to the deposition surface, and varying the angle between a reference direction on the deposition surface and a projected incident direction that is obtained by projecting the direction of the scintillator material incident onto the deposition surface. In the vapor deposition, the amount of the scintillator material deposited on the deposition surface changes according to the angle between the projected incident direction and the reference direction.