Invention Grant
- Patent Title: Memory device and method for fabricating the same
- Patent Title (中): 存储器件及其制造方法
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Application No.: US14476273Application Date: 2014-09-03
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Publication No.: US09530786B2Publication Date: 2016-12-27
- Inventor: Kuang-Wen Liu
- Applicant: MACRONIX International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX International Co., Ltd.
- Current Assignee: MACRONIX International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/11 ; H01L27/115

Abstract:
Provided is a memory device, including a plurality of gate pillar structures and a plurality of dielectric pillars. The gate pillar structures and the dielectric pillars are arranged alternately and separately along a first direction, and are arranged alternately and contact each other along a second direction. In addition, the gate pillar structures and the dielectric pillars are embedded in a stack layer along a third direction, thereby dividing the stack layer into a plurality of stack structures. A sidewall of each of the dielectric pillars in the second direction and a sidewall of the adjacent gate pillar structure in the second direction are not coplanar.
Public/Granted literature
- US20160064498A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-03-03
Information query
IPC分类: