Invention Grant
- Patent Title: Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus
- Patent Title (中): 沉积装置，使用它们的有机发光显示装置的制造方法以及使用沉积装置制造的有机发光显示装置
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Application No.: US14012924Application Date: 2013-08-28
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Publication No.: US09534288B2Publication Date: 2017-01-03
- Inventor: Young-Mook Choi , Jong-Won Hong
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2013-0043030 20130418
- Main IPC: C23C14/56
- IPC: C23C14/56 ; H01L21/677 ; C23C14/04 ; C23C14/50 ; H01L51/56 ; H01L51/00 ; H01L21/673 ; H01L21/67
Abstract:
A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.
Public/Granted literature
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