Invention Grant
- Patent Title: System and method for calibrating charge-regulating module
- Patent Title (中): 校准电荷调节模块的系统和方法
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Application No.: US14716385Application Date: 2015-05-19
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Publication No.: US09536697B2Publication Date: 2017-01-03
- Inventor: Yi-Xiang Wang , Jian Zhang , Yan Zhao
- Applicant: Hermes Microvision Inc.
- Applicant Address: TW Hsinchu
- Assignee: HERMES MICROVISION INC.
- Current Assignee: HERMES MICROVISION INC.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Agent Justin King; Jonathan Chiang
- Main IPC: G01N23/00
- IPC: G01N23/00 ; H01J37/02 ; H01J37/244 ; H01J37/26
Abstract:
This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.
Public/Granted literature
- US20160343534A1 System and Method for Calibrating Charge-Regulating Module Public/Granted day:2016-11-24
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