公开(公告)号：US09536697B2

公开(公告)日：2017-01-03

申请号：US14716385

申请日：2015-05-19

Applicant: Hermes Microvision Inc.

Inventor： Yi-Xiang Wang ,  Jian Zhang ,  Yan Zhao

IPC: G01N23/00 ,  H01J37/02 ,  H01J37/244 ,  H01J37/26

CPC classification number: H01J37/026 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/024

Abstract: This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.

Abstract translation: 本发明提供一种用于在真空环境中校准电荷调节模块的系统和方法。 用于安装充电调节模块的装置向充电调节模块提供运动，使得由样品表面上的充电调节模块照亮的束斑可以移动到由充电微粒照射的预定位置 光束。

公开(公告)号：US20160343534A1

公开(公告)日：2016-11-24

申请号：US14716385

申请日：2015-05-19

Applicant: Hermes Microvision Inc.

Inventor： Yi-Xiang Wang ,  Jian Zhang ,  Yan Zhao

IPC: H01J37/02 ,  H01J37/26 ,  H01J37/244

CPC classification number: H01J37/026 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0047 ,  H01J2237/024

Abstract: This invention provides a system and a method for calibrating charge-regulation module in vacuum environment. Means for mounting the charge-regulation module provides motions to the charge-regulation module such that a beam spot, illuminated by the charge-regulation module, on a sample surface can be moved to a pre-determined position which is irradiated by a charged particle beam.

Abstract translation: 本发明提供一种用于在真空环境中校准电荷调节模块的系统和方法。 用于安装充电调节模块的装置向充电调节模块提供运动，使得由样品表面上的充电调节模块照亮的束斑可以移动到由充电微粒照射的预定位置 光束。