Invention Grant
- Patent Title: Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus
- Patent Title (中): 用于极紫外光发生装置的室和极紫外光发生装置
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Application No.: US14201327Application Date: 2014-03-07
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Publication No.: US09538629B2Publication Date: 2017-01-03
- Inventor: Takashi Saito , Naoyoshi Imachi , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: GIGAPHOTON INC.
- Current Assignee: GIGAPHOTON INC.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JP2013-046932 20130308
- Main IPC: H04N9/64
- IPC: H04N9/64 ; G02B27/64 ; H05G2/00
Abstract:
A chamber for an extreme ultraviolet light generation apparatus is a chamber into which droplets are sequentially outputted, and may include an image capturing unit configured to repeatedly capture images of the droplets during an image capturing time set so that images of two adjacent droplets that have been outputted do not overlap.
Public/Granted literature
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