发明授权
- 专利标题: Current application device and manufacturing method of semiconductor element
- 专利标题(中): 半导体元件的应用现状及其制造方法
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申请号: US14147868申请日: 2014-01-06
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公开(公告)号: US09541577B2公开(公告)日: 2017-01-10
- 发明人: Satoshi Hasegawa , Shigeto Akahori , Shinya Maita , Hitoshi Saito , Yoko Yamaji
- 申请人: HONDA MOTOR CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: HONDA MOTOR CO., LTD.
- 当前专利权人: HONDA MOTOR CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Rankin, Hill & Clark LLP
- 优先权: JP2013-001192 20130108; JP2013-236886 20131115
- 主分类号: G01R1/067
- IPC分类号: G01R1/067 ; G01R31/26
摘要:
Provided is a current application device capable of applying a test current of a magnitude necessary for testing of a semiconductor element without any trouble. A current application device 1 is configured to have a contacting section having a plurality of projections 21 for contacting a contact region 24 inside an active region 23 of a semiconductor element 22 and applying the test current thereto, and a pressing section 3 which presses the contacting section 2 against the semiconductor element 22 such that each projection 21 contacts the contact region 24. A plurality of the projections 21 are arranged such that an arrangement density of outside projections 21 is larger than the arrangement density of inside projections 21.
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